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Transmission Measurements

of Polycrystalline

Silicon Using the ISR-2600Plus

UV-2600

Relative Diffuse Reflection

Measurements of an Anti-Reflective Film

Using the ISR-2600Plus

UV-2600

50.0

40.0

30.0

20.0

10.0

0.0

500.0 600.0 800.0 1000.0

1200.0 1400.0

60.0

40.0

20.0

0.0

300.0 500.0

1000.0 1400.0

This is a transmission measurement of polycrystalline silicon. Since the system is

capable of measurements to 1400 nm, the transmission characteristics of the band

gap region (near 1000 nm) are clearly evident.

This is a reflection measurement of an anti-reflective film. With relative reflection

measurements, the system can measure from the ultraviolet region up to the

near-infrared region, so the suppressed reflectance in the visible region is clearly

evident.

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Ultra Start 26XX Series Bedienerhandbuch Seite 7